Search for content and authors
 

Modeling of growth kinetics of SiC single crystal in PVT process

Tomasz Wejrzanowski 1,  Janusz Dagiel 1,  Mateusz Grybczuk 1,  Jakub Niescior 1,  Emil Tymicki 2,  Krzysztof J. Kurzydlowski 1

1. Warsaw University of Technology, Faculty of Materials Science and Engineering (InMat), Wołoska 141, Warszawa 02-507, Poland
2. Institute of Electronic Materials Technology (ITME), Warszawa 01919, Poland

Abstract

The present paper deals with the design of optimal process conditions for manufacturing of single crystalline SiC with high quality. Different aspects of the technology have been taken into account. The geometry of the reactor was modified to obtain optimal mass transport and temperature profile. The influence of process conditions on the SiC crystal growth kinetics has been also studied. The results of modeling have been implemented in the SiC growth process developed for commercial use.

In these studies the Finite Volume method was applied to understand the phenomena taking place in the PVT (Physical Vapor Transport) reactor during growth of bulk SiC single crystal.

Numerical simulations predict the temperature distribution and growth kinetics at satisfactory level. It was found that especially the early stage of crystal growth might be controlled by changing the insulation types. Apart from the thermal conditions, which can be controlled directly by setting up the temperature on the heaters or indirectly by modification of insulation geometry, the gas pressure in the chamber is of key importance for the growth rate of SiC bulk single crystal.

 

Legal notice
  • Legal notice:

    Copyright (c) Pielaszek Research, all rights reserved.
    The above materials, including auxiliary resources, are subject to Publisher's copyright and the Author(s) intellectual rights. Without limiting Author(s) rights under respective Copyright Transfer Agreement, no part of the above documents may be reproduced without the express written permission of Pielaszek Research, the Publisher. Express permission from the Author(s) is required to use the above materials for academic purposes, such as lectures or scientific presentations.
    In every case, proper references including Author(s) name(s) and URL of this webpage: https://science24.com/paper/29708 must be provided.

 

Related papers
  1. Financing of industry relevant projects in Poland
  2. Electrospun nanocomposites from PHBV for bone tissue engineering
  3. Nanotechnologie w gospodarce województwa podlaskiego
  4. Modeling of heat and mass transfer in GaN MOVPE reactor
  5. The influence of the PVT growth conditions on the SiC crystal shape
  6. Application of micro- and nanostructured biomaterials in regenerative medicine
  7. Core-shell P(LLA-CL) based electrospun nanofibers for peripheral nerve tissue engineering
  8. Surface modification of PCL scaffold changes protein adsorption
  9. TiO2 nanotubes based composite layers for biomedical applications
  10. Modification of epoxy resin properties by adding multi wall carbon nanotubes
  11. Możliwości badawcze Laboratorium Skaningowej Mikroskopii Elektronowej na WIM PW
  12. Otwarcie konferencji
  13. Perspektywy rozwoju nanomateriałów konstrukcyjnych i funkcjonalnych
  14. Zastosowania mikroskopii AFM dla farmacji i medycyny
  15. Wykorzystanie nanotechnologii w procesie odlewania precyzyjnego
  16. Oczyszczanie i modyfikacja nanomateriałów węglowych
  17. Modyfikacje polimerów stosowanych w lotnictwie za pomocą nanorurek węglowych
  18. Luminescent polyurethane nanocomposites: processing, structure and properties
  19. Micro Sensor for cell force measurement
  20. Preliminary studies on degradation of polylactides fibers
  21. Effect of grain size on reactive diffusion between Ti-Al
  22. TEM investigations of the nanostructure, multilayer CrN/Cr coatings obtained by vacuum-arc method
  23. Bulk  nanostructured  titanium  fabricated  by  hydrostatic  extrusion
  24. Composites PLLA/MWNTs produced by twin-screw microcompounder
  25. Polyurethane-based material with calcite and aragonite for tissue engineering composite scaffolds
  26.  A  degradable and highly porous polyurethane scaffolds for bone tissue engineering
  27. Reduced activation ODS ferritic steel – recent development in high speed hot extrusion processing
  28. Investigation of the DLC and novel DLC-polymer hybrid coatings using FIB and SEM techniques
  29. A combination of microCT and FEM methods for development of a new scaffold for bone regeneration
  30. Properties of transparent elastomer nanocomposites (polyurethane/ ZrO2:Eu3+) as materials for optoelectronic application
  31. Investigation of fatique crack growth rate of Al 5484 ultrafine grained alloy after ECAP process
  32. Fire retardant polyurethane elastomers/aluminophosphorate nanocomposites for higher temperature application
  33. The influence of grain refinement on the corrosion mechanism of 7475 aluminium alloy
  34. Modelling the influence of the grain size distribution on the properties of nanometals
  35. Hybrid functional applied to the study of properties of narrow and wide band gap semiconductors
  36. Recrystallization and Grain Growth in Nano-structured Austenitic Stainless Steel under Electric Current Heating
  37. Effect of deformation and strain rate on diminishing of microstructure of aluminium alloys (AlCu4Zr0.5 and AlZn6Mg3CuZr)
  38. Grain refinement in CuCrZr by SPD processing
  39. Tailoring mechanical properties of nano-structured Eurofer 97 steel for fusion applications
  40. Microscopic and surface analytical characterization of TiO2 nanotubes produced by anodic oxidation and thermal treatment 
  41. Investigation of cells interactions with textile scaffolds for bone tissue enginnering
  42. Culture of osteoblasts on nanostructured titanium – preliminary observation
  43. Electrospun polymeric fibers for cartilage regeneration
  44. Biodegradable and bioabsorbable polymeric - ceramic composites for medical applications
  45. Modelling of plastic deformation of nano-polycrystalline materials
  46. Preliminary examinations of mechanical properties of DLC and novel DLC-polymer hybrid coatings for resurfacing hip prostheses
  47. Optimization of the polymeric scaffolds for bone tissue engineering fabricated by rapid prototyping method
  48. Bone tissue engineered product based on human bone derived cells and polyurethane scaffold
  49. Molecular statics simulation of nanoindentation on nanocrystalline copper
  50. Microstructural and mechanical characterization of zirconia based composite
  51. Modeling of order-disorder phase transition in intermetallic compounds
  52. Optimization of polyurethane structure as the potential materials for bone tissue engineering applications
  53. Fabricationg polyurethane/calcium carbonate composite scaffold for bone tissue engineering
  54. Polyurethane nano-composites with luminescence properties for optics and optoelectronics applications.
  55. Tailoring mechanical properties by grain refinement and particle redistribution
  56. Stochastic Approach To The Changes In The Mechanical Properties Of Nano-Crystalline Materials Induced By Grain Growth
  57. Surface effect on atomic ordering in nano-layered L10 AB binaries: multiscale Monte Carlo Simulation
  58. Characterization of nanopowders
  59. Microstructure and mechanical properties of HE-treated titanium depending on its initial state
  60. Influence of hydrostatic extrusion parameters on the microstructure and mechanical properties of 6082 aluminium alloy
  61. The effect of grain size distribution on mechanical properties of nanometals
  62. Morphological and surface analytical characterization of chemically pretreated Ti surfaces intended for biomedical applications
  63. Electron microscopy studies of magnesium hydride
  64. Microstructure and mechanical properties of 7475 aluminium alloy processed by SPD methods
  65. Investigation of aqueous surface processes and corrosion mechanisms of Al-(Cu)-Fe-Cr quasicrystaline approximant
  66. Characterization of the effects of hydrostatic extrusion on structure and surface properties of 303 austenitic stainless steel
  67. The Effect of Hydrostatic Extrusion on the Corrosion Stability of Austenitic Stainless Steels
  68. The Effect of Hydrostatic Extrusion on Resistance of 316 Austenitic Stainless Steel to Pit Nucleation
  69. Nanomaterials in dental applications
  70. Nanostructure formation in austenitic stainless steel
  71. Evaluation of crystal structure and polytypism of SiC in microwave sintered diamond-SiC composite by TEM and HR-TEM
  72. Hydrogen induced changes in 316L stainless steel microstructure
  73. Initial Stage of SiC Crystal Growth by PVT Method
  74. Statistical model of grain growth in polycrystalline nanomaterials
  75. Repair and regeneration of osteochondral defects in the articular joints
  76. Magnetic properties of Fe doped SiC crystals
  77. Corrosion resistance of nanostructured titanium
  78. Effect of surface treatment on the microstructure of TA6V
  79. Predicting site occupation of Fe in B2 NiAl from ab initio computations
  80. Structure and properties of polyurethane/YAG:Tb3+ nano-composites with luminescence properties
  81. Structure and thermal properties of epoxy resins nano-composites with flame retardants
  82. The influence of ZrO2 containing 10% Eu 3+ on the polyurethane hard domain structure of nano-composites with luminescence properties
  83. An influence of boehmite modification on the dispersion in the polyurethane matrix
  84. Materials hardness estimation by simulation of the indentation process
  85. Stability of second phase particles during processing by hydrostatic extrusion
  86. The influence of nano - filler on microstructure homogeneity and selected properties of dental ceramic - polymer composites
  87. Grain Boundary Migration in Nanocrystalline Iron
  88. Thermal properties of L10-TiAl from first principle calculations
  89. Structural stability of zirconia ceramic in water and acid solutions
  90. The influence of the structure of metastable τ - phase on magnetic hysteretic properties of Мn55.5Аl44С0.5 alloy
  91. Morphology and chemical characterization of Ti surfaces modified for biomedical applications
  92. Investigations of phase composition and grain size distribution in Pr doped ZrO2
  93. Modelling of Grain Growth in nano-polycrystalline materials
  94. Evaluation of degradation degree of dental hybrid composite used as permanent fillings
  95. Optimization of particle reinforced lead-free solders
  96. Microstructural evaluation during particles addition to lead-free solders
  97. Thermal stability of hybrid polyurethane and modified boehmite
  98. Applications of quantitative image analysis to the description of the morphology of hybrid polyurea-nitryle-urethanes
  99. Improvement of wetting and bonding of SiO2 ceramics and urea-urethane elastomer
  100. A hybrid atomistic-continuum finite element modelling of locally disordered crystalline structure
  101. The role of the weak points in the corrosion resistance of hydrostatically extruded steel porducts
  102. The size effect in strength and fracture toughness of deformation origin submicro- and nanomaterials.
  103. The influence of hydrostatic extrusion on mechanical properties and tribological characteristics of an austenitic stainless steel
  104. Fabrication and micro-structure characterization of Al2O3/Ni-P composites with interpenetrating phases
  105. Hydrostatic extrusion of intermetallic Ti-Al layers
  106. PULSE PLASMA SINTERING OF A NANOCRYSTALLINE Cu POWDER
  107. NANOCRYSTALLINE Cu-Al2O3 COMPOSITES SINTERED BY THE PULSE PLASMA TECHNIQUE
  108. Mechanical properties of aluminium processed by equal channel angular pressing
  109. Model for intermetallic phase and intermetallic compound solidification during diffusion soldering
  110. Texture Development in Model Al-Li Alloy Subjected to Severe Plastic Deformation
  111. The Influence of hydrostatic extrusion on microstructure of 6082 aluminum alloy
  112. Combination of ECAP and Hydrostatic Extrusion for ultra-fine grain (UFG) microstructure generation in 99.98% nickel.
  113. Microstructure refinement under high plastic strain rates in hydrostatic extrusion process
  114. Influence of severe plastic deformation on PLC effect in Al 5XXX alloy
  115. Mechanical properties and deformation behaviour of ultra-fine grained nickel.
  116. Formation of ultrafine gradient structure in hard magnetic alloy Fe-30%Cr-8%Co
  117. Sintering temperature effect on structure and properties of Al2O3/Ni-P composites with interpenetrating phases
  118. PLASTIC PROPERTIES OF GaN AND Al2O3 CRYSTAL: FEM-SIMULATION OF NANOINDENTATION CONFIRMED BY HIGH-RESOLUTION MICROSCOPY
  119. SEM investigations of tooth/ filling bonding
  120. Measuring the Grain Size Distribution of Pr-doped Zirconia Nanopowders obtained by Microwave Driven Hydrothermal Synthesis
  121. Nanometals for medical applications
  122. Effect of sever plastic deformation method on microstrucure and mechanical properties of Al and Cu
  123. The influence of twin bands density on microstructure of 316LVM austenitic stainless steel subjected to transverse rolling
  124. Microstructure evaluation in an Al-Li alloy processed by severe plastic deformation
  125. Polymer matrix composites with nanoparticles of TiC obtained by a sol-gel method
  126. Annealing temperature effect on residual stresses in 316L steel subjected to HPT process
  127. FINITE ELEMENT MODELLING OF THE RESIDUAL STRESSES IN THE CERAMIC-ELASTOMER COMPOSITES
  128. EFFECT OF INITIAL MICROSTRUCTURE ON MECHANICAL PROPERTIES OF THE Al-Cu-Mg-Mn ALLOY PROCESSED BY HYDROSTATIC EXTRUSION
  129. THE INFLUENCE OF HIGH-ANGLE BOUNDARIES ON THE MECHANICAL PROPERTIES OF NANO-CRYSTALLINE IRON OBTAINED BY SEVERE PLASTIC DEFORMATION
  130. Modelling the interaction of crack tip with nanostructure, which creating by deformation.
  131. SHRINKAGE OF DENTAL POLYMERIC COMPOSITES
  132. IN VIVO WEAR OF POLYETHYELNE GLENOID COMPONENTS IN TOTAL SHOULDER ARTHROPLASTY
  133. Atomic-scale Ab-initio computations of the B2-RuAl
  134. Ab-initio calculations of elastic properties Ni3Al and TiAl under pressure
  135. Modelling of the Influence of the Grain Size Distribution on the Grain Growth in Nanocrystals
  136. Ductility of Nanocrystalline Materials Processed by Severe Plastic Deformation
  137. Structural-strength aspects of glass/metallic composite based on Co-Cr-Mo implantation alloy
  138. Microstructure and mechanical properties of binary Al-Li alloys processed by ECAP
  139. Microstructure of the ceramic - polymer composites for dental applications
  140. Effect of Non-conventional Large Deformations on Microstructure and Properties of Metals
  141. Excellent Mechanical Properties of Nickel Processed by High Pressure Techniques
  142. Morphology and properties of oxide films formed on the nanocrystalline 316L austenite steel
  143. Al2O3-Fe functionally graded materials fabricated under magnetic field
  144. Professor CZOCHRALSKI - Distinguished Scientist and Inventor, Founder of the Modern Materials Science
  145. The influence of temperature and pressure on possibility of obtaining Al2O3/Ni-P nanocomposite through hot pressing process.
  146. Mechanical properties nanostructured iron obtained by different methods of Severe Plastic Deformation
  147. Strain localization in nanocrystalline iron after Severe Plastic Deformation
  148. Non-elastic behaviours of high-porosity ceramics and ceramic-polymer composites
  149. The Superplasticity of Hard Magnetic Alloy Fe-23wt.%Co-30%Cr with Submicrocrystalline Structure
  150. Microstructure of Ni-P thin layers obtained by a chemical method
  151. Hydrostatic extrusion and nanostructure formation in an aluminium alloy
  152. Quantitative Description of Microstructure of Nano-materials
  153. The Structure and Mechanical Properties of Low Carbon Low Alloy Steel Subjected to Severe Plastic Deformation
  154. Studies of Ni-P Thin Films by Electroles Deposition Method
  155. Stereology of Nanomaterials
  156. Targeted Research Project: Metallic, Ceramic and Organic Nanomaterials: Processing - Structure - Properties - Applications
  157. Materials Research in Poland

Presentation: Poster at 17th International Conference on Crystal Growth and Epitaxy - ICCGE-17, Topical Session 3, by Tomasz Wejrzanowski
See On-line Journal of 17th International Conference on Crystal Growth and Epitaxy - ICCGE-17

Submitted: 2013-04-15 13:53
Revised:   2013-04-15 13:53