The properties of Fe/Fe-N based structures are a topic of intensive studies during at least ten last years. Up to now, the successful Fe/Fe-N multilayer growth has been reported by a few groups only and was mostly limited to the long-period structures. Moreover, available results suggested wide and rough Fe/Fe-N interfaces. Similar multilayers were recently deposited by the sputtering on GaAs substrates at the Institute of Physics of the Polish Academy of Sciences. The goal of the present paper was to demonstrate the successful growth of the short-period Fe/Fe-N multilayer, consisting of 22 repetitions of 40 Å thick Fe layer followed by 12 Å thick Fe-N layer. The high quality of the investigated structure was proved by X-ray reflectometry, neutron scattering, and transmission electron microscopy. In particular, our results demonstrated the presence of narrow (sharp) Fe/Fe-N interfaces, which are important for possible new applications.

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