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Structure and Magnetization of Defect-Associated Sites in Silicon

Eun S. Choi 1Lee Chow 2Guangyu Chai 2Andrzej Misiuk 3Adam Barcz 3,4Richard Vanfleet 5

1. National High Magnetic Field Laboratory (NHMFL), Tallahassee, FL 32310-3706, United States
2. University of Central Florida, Orlando, FL, United States
3. Institute of Electron Technology (ITE), al. Lotników 32/46, Warszawa 02-668, Poland
4. Polish Academy of Sciences, Institute of Physics, al. Lotników 32/46, Warszawa 02-668, Poland
5. Brigham Young University, Provo, UT 84602, United States


Recently ferromagnetic hysteresis has been observed at room temperature in single crystalline silicon wafers implanted with Si or Ar ions, and also in silicon wafers irradiated with high flux of neutron beam [1]. The authors suggested that the paramagnetic defects created during implantation or irradiation maybe are among the factors responsible for the observed magnetic behavior. These results could also have important implications on the magnetic behaviors of metal implanted silicon wafers [2,3].

To better understand the mechanisms of the reported ferromagnetic hyseresis loop, we carry out high resolution transmission electron microscopic and magnetic study of Fz-Si and Cz-Si silicon wafers damaged, to produce different kinds of defects, by three different methods: (a) irradiation with 2.5 MeV electrons at a flux of 1×1017 cm-2, (b) self-implantion with 150 keV Si+ ions at a flux of 2×1016 cm-2, and (c) implantion with 20 keV He+ ions at an angle of 60° and at a flux of 1×1017 cm-2. The results of these studies will be reported.


  1. T. Dubruca, J. Hack, R.E. Hummel, and A. Angerhofer, Appl. Phys. Lett. 88, 182504 (2006).
  2. M. Bolduc, C. Awo-Affouda, A. Stollenwerk, M.B. Huang, F. Ramos, G. Agnello, V. P. LaBella, Phys. Rev., B71, 033302 (2005).
  3. P. R. Bandaru, J. Park, J. S. Lee, Y. J. Tang, L. H. Chen, S. Jin, S. A. Song, and J. R. O’Brien, Appl. Phys. Lett. 89, 112502 (2006).

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Submitted: 2007-01-14 05:23
Revised:   2009-06-07 00:44