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Selective Multiterminal Sensor on Individual ZnO Nanotetrapod  

Lee Chow 1Oleg Lupan 1,2Guangyu Chai 1Viorel Trofim 2

1. University of Central Florida, Orlando, FL, United States
2. Technical University of Moldova (TUM), Bld. Stefan cel Mare, 168, Chisinau 2004, Moldova


Sensors based on semiconducting oxides nanostructures such as zinc oxide nanowires, nanotubes and nanorods have attracted vast and persistent attention for detecting ultraviolet (UV) radiation, gas and chemicals [1-3]. Low-cost, nonpoisonous and highly sensitive and selective sensors are very desirable for detection of various gases and chemicals in the environment.  Here we present a sensitive and selective sensor based on individual ZnO nano-tetrapods for detection of UV light and H2 gas at room temperature.  The ZnO nano-tetrapod sensor was synthesized by a solution method [4].

For the sensor fabrication, focused ion beam technique is employed.  The ZnO nano-tetrapods were first transferred to another SiO2 coated silicon substrate using an ultrasonic bath.  After transferr, we greatly reduce the density of nano-tetrapods on the substrate surface and make the individual manipulation of the ZnO nano-tetrapod possible.  The sensitivity of the ZnO nano-tetrapod sensor versus different types of test gases, like H2, CO, LPG and CH4 are presented.  It was observed that the developed sensor shows different sensitivity values to different gases.


[1] E. Comini, G. Faglia, G. Sberraglieri, Z. Pan, and Z. L. Wang, Appl. Phys. Lett. 81, 1869 (2002).

[2] O. Lupan, G. Chai, L. Chow, Microelectronics Journal 38, 1211, 2007.

[3] M. C. Newton, S. Firth, P. A. Warburton, Appl. Phys. Lett. 89, 072104, 2006.

[4] O. Lupan, L. Chow, and G. Chai, Sensors & Actuators, B. To appear.


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Presentation: Oral at E-MRS Fall Meeting 2009, Symposium C, by Lee Chow
See On-line Journal of E-MRS Fall Meeting 2009

Submitted: 2009-05-25 19:42
Revised:   2009-06-07 00:48