Sensors based on semiconducting oxides nanostructures such as zinc oxide nanowires, nanotubes and nanorods have attracted vast and persistent attention for detecting ultraviolet (UV) radiation, gas and chemicals [1-3]. Low-cost, nonpoisonous and highly sensitive and selective sensors are very desirable for detection of various gases and chemicals in the environment.  Here we present a sensitive and selective sensor based on individual ZnO nano-tetrapods for detection of UV light and H₂ gas at room temperature.  The ZnO nano-tetrapod sensor was synthesized by a solution method [4].

For the sensor fabrication, focused ion beam technique is employed.  The ZnO nano-tetrapods were first transferred to another SiO₂ coated silicon substrate using an ultrasonic bath.  After transferr, we greatly reduce the density of nano-tetrapods on the substrate surface and make the individual manipulation of the ZnO nano-tetrapod possible.  The sensitivity of the ZnO nano-tetrapod sensor versus different types of test gases, like H₂, CO, LPG and CH₄ are presented.  It was observed that the developed sensor shows different sensitivity values to different gases.

References

[1] E. Comini, G. Faglia, G. Sberraglieri, Z. Pan, and Z. L. Wang, Appl. Phys. Lett. 81, 1869 (2002).

[2] O. Lupan, G. Chai, L. Chow, Microelectronics Journal 38, 1211, 2007.

[3] M. C. Newton, S. Firth, P. A. Warburton, Appl. Phys. Lett. 89, 072104, 2006.

[4] O. Lupan, L. Chow, and G. Chai, Sensors & Actuators, B. To appear.

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