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Spectroscopy of Cz-Si samples subjected to implantation and thermal treatment under enhanced hydrostatic pressure. |
Evgeny Shemchenko 1, Alexander Yakovec 1, Rostyslav V. Shalayev 1, Victor M. Varyukhin 1, Anatoly Prudnikov 1, Boris M. Efros 1, Andrzej Misiuk 2, M. Prujszczyk 2 |
1. National Academy of Sciences of Ukraine, A.Galkin Donetsk Institute for Physics & Technology (DonPTI NASU), Roza Luxemburg 72, Donetsk 83114, Ukraine |
Abstract |
Recent developments in the fields of integrated circuits, CD technology, and of transmission of large volume information resulted in still growing interest in optical and spectral properties of silicon - related materials, in particular produced basing on single crystalline Czochralski grown silicon, Cz - Si. Electronic states related to the presence of structural defects and impurities in Cz-Si - related materials [1] are still intensively investigated. In the presented work, Cz - Si samples prepared by implantation with hydrogen (Si:H) or oxygen (Si:O), and processed at up to 1400 K (HT) under enhanced hydrostatic pressure in argon atmosphere (HP, up to 1.2 GPa) have been investigated. It has been shown that the HT - HP treatment of implanted samples leads to the formation of nano - clusters. The nano - dimensional structure formation in the samples results in turn in essential changes of optical and spectral properties, being dependent on the HT - HP processing parameters. The mechanism and nature of nano - dimensional structure formation in implanted single crystalline silicon, especially in Si:H, subjected to complex processing [2, 3], and the effects of HT – HP treatment on spectral characteristics of Si:H and Si:O are discussed. Usefulness of such materials for producing of sensors has been demonstrated.
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Presentation: Poster at Joint Fith International Conference on Solid State Crystals & Eighth Polish Conference on Crystal Growth, by Rostyslav V. ShalayevSee On-line Journal of Joint Fith International Conference on Solid State Crystals & Eighth Polish Conference on Crystal Growth Submitted: 2007-01-15 15:14 Revised: 2009-06-07 00:44 |