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An RBS Study of Thin PLD and MOCVD Strontium Copper Oxide Layers
|Zoltán Kántor 2, Evie L. Papadopoulou 3, Elias Aperathitis 3, Jean-Luc Deschanvres 4, Károly Somogyi 1, Istvan Szendro 1|
1. MicroVacuum, Kerékgyarto u. 10, Budapest H-1147, Hungary
Strontium copper oxide (SCO) layers have been extensively studied as p-type transparent (VIS) conductive oxide material. Also theoretical studies suggested p-type conductivity of the SrCu2O2 composition. This oxide is promising also in replacing of oxides containing an In component.
SCO thin layers, with thicknesses 50 to 1500 nm were deposited either by pulsed laser deposition method, or by MOCVD. According to the needs of various measurements, both glass and silicon substrates were used. The as grown layers showed high electrical resistance. Due to an annealing process the resistivity was significantly decreased and the layers showed p-type conductivity. Optical transparency was measured on samples grown on glass substrates and it was found about or above 80 % was found, including also some thickness dependence.
These layers are intended to be used in various devices, the structure and composition of the oxide have great importance. The study of the surfacial and, especially, interfacial regions is difficult, partly because of the small layer thicknesses. RBS measurements were applied for the determination of the chemical composition profile of the layers. These measurements included samples grown with the mentioned technologies and substrate types. In this study one pair of halves of a PLD sample was analysed such a way that one half was left in as grown state and the second one was annealed. This unique comparison revealed some specific differences between these halves. Furthermore, a vertical inhomogeneity was observed demonstrating an effect of the interface.
Measurements revealed also differences between samples grown by the two different deposition techniques, though the substrates were also different. Special modelling evaluation software was also developed with the aim to facilitate choice of the experimental conditions for the real measurements. This way conditions and requirements for the live experiment can be formulated more precisely and more quickly.
Presentation: Poster at E-MRS Fall Meeting 2007, Symposium H, by Károly Somogyi
See On-line Journal of E-MRS Fall Meeting 2007
Submitted: 2007-05-21 22:46 Revised: 2009-06-07 00:44