UV-VIS-NIR Spectrophotometry and Spectroscopic ellipsometry (SE) are two non-destructive and versatile characterization techniques that have applications in many different fields. These optical characterization techniques are well established in the semiconductor, flat panel display, optical coatings, data storage, telecommunication, chemical and biological applications, for demanding research or industrial quality control applications.

In this tutorial an overview of the principles and instrumentation for UV-VIS-NIR Spectrophotometry and Spectroscopic ellipsometry will be presented.

Typical information's that can be extracted from these two optical characterization techniques are:

* Optical constants and film thickness

* Optical band gap and interband transitions

* Surface or interfacial roughness

* Chemical composition or intermixing

* Crystallinity (polymorphs identification)

* Micro-porosity

* Anisotropy or birefringence

General rules for building optical models with a more details discussion for the case of spectroscopic ellipsometry are presented. Several examples of functional oxides will be also discussed.

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