Organosilane self assembled monolayer have been widely applied to the artificial control of surface chemical functionalities. These chemical functionalities is very important to promote or minimize the biomolecular adhesion because these SAM surfaces are modified with such materials or molecules, the resulting surface modification chemistries are governed by intermolecular interactions between the SAM surfaces and the adsorbing molecular species [1-4]. In addition to chemical functionalities, SAM provide the ability to form micro pattern. By patterning aminosilane SAMs, microtemplates have been fabricated and successfully applied to the spatial arrangement of biomolecules. In order to prepare the terminal functional group, aminosilane self assembled monolayers (SAMs) are formed onto the photochemically cleaned SiO₂/Si substrates by the chemical vapor deposition method. Each of the samples are sonicated for 20 min in absolute ethanol, toluene, 1 mM NaOH and 1 mM HNO₃ aqueous solutions. The surface chemical functionalities of amino-terminated SAMs are analyzed with an atomic force microscope and Kelvin-probe force microscopy. The molecular functionalities can be switched on and off by changing their polarization states while applying various bias voltages ranging from -6 to + 6 V to the SAM. Depending on the bias voltage, surface potential of the SAM is 150 mV at -6V and - 50 mV at 6 V. The NO-terminated SAM surface is to be negatively polarized since the NO groups attract electrons from the aromatic rings that consist of the SAM. Therefore, the surface potential of the SAM shifts toward the negative direction. In contrast, the NH-terminated surface is positively polarized since the NH groups supply electrons to the aromatic rings.

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