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Metastable Phase and Structural Transitions of Superthin Ti/Si and TiN/SiN Multilayers
|Jerzy Ciosek 1, Sylwia Burdyńska 2, Artur Prokopiuk 2, Roman Major 3, Bogusław Major 3, Roman Minikayev 4, Tomasz R. Przesławski 1, Waldemar Mróz 2|
1. Institute of Electron Technology (ITE), al. Lotników 32/46, Warszawa 02-668, Poland
Composite structures based on Ti - Si and TiNx - SiNx materials are interesting for photonic, optoelectronic and sensor techniques. The TiNx - SiNx multilayers were deposited on Si(100)-wafers by laser ablation of the Ti and Si targets in ambient nitrogen gas in range of pressures ranging from 3x10-3 to 5x10-3 mbar. The layer thickness and composition was controlled by parameters of the excimer laser pulses (wavelength at 193 nm), ambient gas species and gas pressure.
Presentation: Poster at E-MRS Fall Meeting 2006, Symposium A, by Jerzy Ciosek
See On-line Journal of E-MRS Fall Meeting 2006
Submitted: 2006-05-15 09:41 Revised: 2009-06-07 00:44