Gradient-index (GRIN) materials have received wide attention in material sciences for considering the effect of materials graded inhomogeneity on the optical, piezoelectric and nonlinear effects as well as due to MEMS applications.

Gradient index composite structures based on TiN_x materials are interesting for photonic, optoelectronic and sensor techniques. The TiN_x layers were deposited on Si-wafers (100) by laser ablation of a Ti target with different nitrogen gas pressure up to 3x10^-2 mbar. The layer thickness of 22 nm and composition was controlled by parameters of the excimer laser pulses (wavelength at 193 nm) and nitrogen gas pressure.

The sample was annealed using Rapid Thermal Process (RTP) at 600^oC in Ar flow by 10 min. A profile of TiN refractive index and a nitrogen concentration depends on process parameters. Surface and interfacial layer-substrate energies dominate both a bulk and a strain-energy term, which encourages the formation of metastable phase with a low inner-energy. The TiN_x layers show hydrogen and oxygen high sensitivity and change of Ti/TiN ratio at as prepared - and RTP processed - sample. XPS and SIMS was applied to compositional study of TiN_x layers. Samples were analysed by AFM and spectroscopic methods. 

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