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Michał Ćwil |
Affiliation: |
Industrial Institute of Electronics
address: | Dluga, Warszawa, 00-241, Poland | phone: | 8312160 | fax: | 8315221 | web: | | |
Affiliation: |
Warsaw University of Technology, Faculty of Physics
address: | Koszykowa 75, Warszawa, 00-662, Poland | phone: | +48 22 6296124 | fax: | +48 22 6282171 | web: | http://www.if.pw.edu.pl | |
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Publications: |
- Comparative study of superthin TiNx layer by XPS and low energy SIMS
Si-oxide and Si-oxynitride interfaces analysed by ultra-low energy SIMS - SIMS depth profiling of thin nitride- and carbide-based films for hard coating
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