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In situ investigation of thermally influenced phase transformations in (Pb0.92Sr0.08)(Zr0.65Ti0.35)O3 thin films using micro-Raman spectroscopy and X-ray diffraction

Sharath Sriram 1Madhu Bhaskaran 1Tatiana S. Perova 2Vasily Melnikov 2Gordon J. Thorogood 3Ken T. Short 3Anthony S. Holland 1

1. RMIT University, Sch. of Elec. and Comp. Engg., Microelectronics and Materials Technology Centre (RMIT), GPO Box 2476V, Melbourne, Victoria, Melbourne 3001, Australia
2. Trinity College, Department of Electron. and Elec. Engg., Microelectronics Technology Group (TCD), College Green, Dublin Dublin 2, Ireland
3. Australian Nuclear Science and Technology Organisation, Institute of Material Science and Engg. (ANSTO), PMB 1, Menai, New South Wales, Sydney 2234, Australia


Thin films of ferroelectric strontium-doped lead zirconate titanate [PSZT, (Pb0.92Sr0.08)(Zr0.65Ti0.35)O3] deposited by RF magnetron sputtering have been analyzed by in situ analysis techniques. These analyses are used to study the phase transformation from room temperature perovskite or near-perovskite to cubic orientation at higher temperatures; this is used to identify the Curie point of the thin films deposited under different sputtering conditions. The in situ techniques employed for this study include micro-Raman spectroscopy (μRS) and X-ray diffraction (XRD); and variations in temperatures up to 350 ºC and 750 ºC for the respective techniques has been studied.

The PSZT samples analyzed include samples deposited on gold and platinum coated silicon substrates (with varying adhesion layers); and samples deposited at either room temperature or higher temperatures (up to 750 ºC) on these substrates. The analyses were carried out in chosen gas ambient or vacuum, based on the type of sample; with data collected at regular temperature intervals (steps of 25-50 ºC). To determine the transformation temperature, and the presence of hysteresis, analysis was carried out during both temperature ramp-up and ramp-down cycles.

Significant variations in peaks for both μRS and XRD exist for samples of PSZT deposited on gold and on platinum. These peaks have been systematically analyzed and variations relative to other gathered spectra have been discussed, given the limited literature available on PSZT. The results highlight variations in the Curie point based on deposition parameters.

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Presentation: Poster at E-MRS Fall Meeting 2007, Symposium J, by Sharath Sriram
See On-line Journal of E-MRS Fall Meeting 2007

Submitted: 2007-05-04 08:04
Revised:   2009-06-07 00:44