Thin films of ferroelectric strontium-doped lead zirconate titanate [PSZT, (Pb_0.92Sr_0.08)(Zr_0.65Ti_0.35)O₃] deposited by RF magnetron sputtering have been analyzed by in situ analysis techniques. These analyses are used to study the phase transformation from room temperature perovskite or near-perovskite to cubic orientation at higher temperatures; this is used to identify the Curie point of the thin films deposited under different sputtering conditions. The in situ techniques employed for this study include micro-Raman spectroscopy (μRS) and X-ray diffraction (XRD); and variations in temperatures up to 350 ºC and 750 ºC for the respective techniques has been studied.

The PSZT samples analyzed include samples deposited on gold and platinum coated silicon substrates (with varying adhesion layers); and samples deposited at either room temperature or higher temperatures (up to 750 ºC) on these substrates. The analyses were carried out in chosen gas ambient or vacuum, based on the type of sample; with data collected at regular temperature intervals (steps of 25-50 ºC). To determine the transformation temperature, and the presence of hysteresis, analysis was carried out during both temperature ramp-up and ramp-down cycles.

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