Pulsed laser deposition (PLD) is a very efficient technique for the fabrication of the thin films, especially for the fabrication of metal oxide thin films at low temperature. In PLD system, the KrF excimer laser (l = 248 nm) is used to ablate ZnO target. During ablation the target is melted because of the irradiation of the high-energy pulsed laser. The melted zinc oxide is then evaporated and the plasma is produced during the process. High-quality zinc oxide thin films are deposited on the sapphire (0001) substrates at room temperature. Rapid thermal annealing process is followed to process the thin films at different temperatures (100, 200, 300, 400, 500, and 600^oC, respectively) in oxygen or in air for 10 minutes. X-ray diffraction (XRD), optical transmission, Raman spectroscopy, photoluminescence (PL), and atomic force microscopy (AFM) are used to characterize the thin films. It is found that the thin films annealed at higher temperatures are preferred (002) orientation, but the thin films annealed at low temperatures are amorphous nature. The band gap energies are determined from the transmission data by spectrophotometer. PL results reveal that the thin films annealed in air have two emissions. One is the near band emission; the other is the famous green-yellow emission in ZnO thin films. The green-yellow emissions are depressed when the thin films are annealed in oxygen.

• Legal notice:
  

  Copyright (c) Pielaszek Research, all rights reserved.
  The above materials, including auxiliary resources, are subject to Publisher's copyright and the Author(s) intellectual rights. Without limiting Author(s) rights under respective Copyright Transfer Agreement, no part of the above documents may be reproduced without the express written permission of Pielaszek Research, the Publisher. Express permission from the Author(s) is required to use the above materials for academic purposes, such as lectures or scientific presentations.
  In every case, proper references including Author(s) name(s) and URL of this webpage: https://science24.com/paper/8136 must be provided.

1. Structural and optical properties of Mg_0.1Zn_0.9O/ZnO multilayer grown by Pulsed Laser Deposition
2. Growth and characteristics of annealed n-ZnO/p-6H-SiC heterostructure
3. Characterization of n-Mg_xZn_1-xO/ZnO/p-GaN double heterostructure grown by pulsed laser deposition
4. Gallium and Arsenic Co-doped ZnO Thin Films Deposited by Pulsed Laser Deposition