Single layer antireflection coating(SARC) is found to be the alternate for the current multilayer antireflection coatings . Titanium Nitride(TiN)is found to be appropriate for its good mechanical properties and optical properties. Recently very thin TiN films were found as an antireflection(AR) and antistatic(AS) layer for display applications. TiN films are fabricated by r.f. magnetron sputtering and the optical, electrical and compositional properties were investigated. The oxygen content is found in the XPS measurements revealed that our TiN films were actually titanium oxynitiride (TiN_x O_y) which is found to play an important role in AR properties .The optical properties TiN_xO_y films usually vary with the stoichiometry and crystallinity . so the experiment is carried out for different ratios of Ar/ N₂ to vary the optical property of the film. Spectroscopic ellipsometer (SE MF-1000) and UV-Vis spectrophotometer (SCINCO) were used for the optical measurements such as refractive index , transmittance and reflectance measurements.

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