TiON as multifunctional nanostructured film

Christos Trapalis 1Mariuca Gartner 2Petre Osiceanu 2Tionica Stoica 3Toma Stoica 3Theophilou Giannakopoulou 1Nikos Todorova 1Anastasios Lagoyannis 4

1. Institute of Materials Science, NCSR “Demokritos”, 153 10 Ag. Paraskevi, Attiki, Greece, Athens 153 10, Greece
2. Instituite of Physical Chemsitry (ICF), Splaiul Independentei 202, Bucharest 060021, Romania
3. National Institute of Materials Physics (NIMP), Atomistilor 105 bis, Bucharest 077125, Romania
4. Institute of Nuclear Technology & Radiation Protection, National Centre for Scientific Research "Demokritos" in Athens, Athens, Greece


Based on the excellent physico-chemical properties (high melting point, extreme hardness, high chemical stability, high electronic conductivity, interesting optical properties) nanocrystalline titanium oxynitride (TiON) films have wide applications for cutting tools, heat mirror, wear resistant coatings in bone surgery and not in the last row as photocalyst in visible light applications (having the optical bandgap, Eg, in VIS range). Undoped TiO2 sol-gel films were obtained by five alternative coatings TiO2 – PEG2000-10% (PEG2000 means polyethylene glycol with molar weight 2000) on quartz substrate, thermally treated at 500oC for 2h in O2 while the N doped TiO2 films were obtained after an additional treatment at 500oC for 2h in NH3 atmosphere. To choose the optimal temperature of treatment the N doped films were supplementary treated at various temperatures up to 1100 oC. Spectroscopic ellipsometry (SE) was used to follow the changes in the optical properties of the films. Different simulation models were handled based on the information received from X-Ray Diffraction and different spectroscopic analysis such as: Rutherford Backscattering, X-ray Photoelectron, Fourier Transform Infrared and UV-VIS.

The RBS measurements exhibited that the biggest N concentration and the smallest O concentration were found in the film treated in NH3 at 1100 oC where the osbornite (TiN0.9) is formed (based on XRD analysis). In agreement with these data the UV-VIS shows a smaller transmittance when the samples are calcined up to 1100 oC. The value of absorption index (from SE analysis) increases from 0.09 at 600 oC to 1.58 at 1100 oC, at l=633 nm. Related to refractive index, there is a competition between the densification processes (which leads to the increasing of refractive index) and enhancement of dopant concentration (which has the contrary tendency) reflected in its behavior.

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Presentation: Poster at E-MRS Fall Meeting 2007, Symposium H, by Mariuca Gartner
See On-line Journal of E-MRS Fall Meeting 2007

Submitted: 2007-05-21 14:10
Revised:   2009-06-07 00:44
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