Influence of deposition temperature on self organized growth of Ge quantum dots (QDs) during magnetron deposition of (Ge+SiO₂)/SiO₂ multilayers is investigated. We demonstrate formation of three-dimensional QD superlattices in completely amorphous matrix for narrow range of deposition temperatures. Self-ordered growth and QD superlattice formation is explained by surface morphology of growing layer combined with diffusion mediated nucleation. In addition we show that self-ordering leads to formation of size uniform QDs and induces collective behaviour, observed as coherent acoustic vibrations of QDs.

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