Cerium vanadate films on glass substrate were obtained by sol-gel process. The morphology of these nanostructured and porous films was studied by grazing-incidence small-angle X-ray scattering (GISAXS). The aim of the GISAXS study was to investigate the changes in grain sizes due to the temperature evolution with three different time intervals (5min., 15 min. and 30 min.) of annealing at 673 K. We found that the effects of the different times of annealing are diverse for surface and bulk properties of this V/Ce oxide. Although the increase in size is common to all the samples, it is far more pronounced in the bulk. The result is that for short annealing time grain sizes are bigger close to the surface, while this is reversed after long annealing. Generally, the annealing time is critical parameter in sol-gel preparation of the nanostructured vanadium oxide films, which are used as electrodes in new optoelectronic devices. This particular morphology is quite suitable for application in electrochromic devices, in an advanced electrochemical cell concept and efficient new solar cells.

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