General Session 6G06: In situ monitoring, new equipment and technologies |
Michael Heuken (AIXTRON SE, Germany)
Next generation production MOVPE - on the role of in-situ
metrology for process control and yield enhancement
Kiyoshi Kanisawa (NTT Corporation, Japan)
Electronic processes in adatom dynamics at epitaxial semiconductor
surfaces studied using MBE-STM combined system
Markus Pristovsek (University of Cambridge, UK)
Growth monitoring of nitride semiconductors at its limit
Masamitu Takahasi (Japan Atomic Energy Agency, Japan)
In-situ monitoring of molecular-beam epitaxial growth of zero-,
one-, and two-dimensional structures using synchrotron X-ray
diffraction