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Andrian V. Kuchuk
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Affiliation:
V.E.Lashkarev Institute of Semiconductor Physics of NAS of Ukraine
address:
45 Nauky Prospekt, Kyiv, 03028,
Ukraine
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fax:
web:
http://www.isp.kiev.ua
Affiliation:
Institute of Electron Technology
address:
al. Lotników 32/46, Warszawa, 02-668,
Poland
phone:
(4822)5487792
fax:
(4822)8470631
web:
http://www.neti.ite.waw.pl
Participant:
E-MRS Fall Meeting 2004
began:
2004-09-06
ended:
2004-09-10
Presented:
E-MRS Fall Meeting 2004
Structural analysis of reactively sputtered W-Ti-N thin films
E-MRS Fall Meeting 2004
Diffusion barrier properties of reactively sputtered W-Ti-N thin films
Publications:
Diffusion barrier properties of reactively sputtered W-Ti-N thin films
Structural analysis of reactively sputtered W-Ti-N thin films
Study of Long-Term Stability of Ohmic Contacts to GaN
TaSiN, TiSiN and TiWN diffusion barriers for metallization systems to GaN
Thermally stable Ru-Si-O gate electrode for AlGaN/GaN HEMT
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