Previous studies revealed that Au(I) and Ag(I) complexes with perfluorinated carboxylates and tertiary phosphines presented sufficient volatility for chemical vapour deposition (CVD), hence the purpose of this work was to prepare volatile precursors for CVD of copper metal or copper oxide thin films. Cu(I) complexes with trimethyl phosphite and aliphatic perfluorinated carboxylates of the type [Cu₂{P(OMe)₃}₂(μ-RCOO)₂] where R = CF₃, C₂F₅, C₃F₇, C₆F₁₃, C₇F₁₅, C₈F₁₇, C₉F₁₉ have been prepared as viscous liquids. The EI mass spectrometry, temperature-variable IR spectroscopy and thermal studies were undertaken to determine the type of species appeared in the gas phase and the thermal decomposition reaction mechanism. The thermal analysis data suggest, that compounds studied can be used in CVD of copper oxide films, however the decomposition product can be modify by conditions applied for the deposition technique. The MS and temperature-variable IR data analysis pointed to [Cu₂{P(OMe)₃}₂(μ-C₆F₁₃COO)₂] as the most suitable potential liquid CVD precursor from the complexes studied. CVD experiments were performed in the low-pressure horizontal CVD reactor using argon as the carrier gas. The obtained films were investigated by XPS. More than two forms of copper were existed on the sample surface and unfortunately some impurities of carbon, fluorine and phosphorous.

• Legal notice:
  

  Copyright (c) Pielaszek Research, all rights reserved.
  The above materials, including auxiliary resources, are subject to Publisher's copyright and the Author(s) intellectual rights. Without limiting Author(s) rights under respective Copyright Transfer Agreement, no part of the above documents may be reproduced without the express written permission of Pielaszek Research, the Publisher. Express permission from the Author(s) is required to use the above materials for academic purposes, such as lectures or scientific presentations.
  In every case, proper references including Author(s) name(s) and URL of this webpage: https://science24.com/paper/903 must be provided.

1. Studies of CVD Nanometallic Layers Prepared from Cu and Ag Carboxylates
2. Influence of structural and thermal properties of new CVD precursors of copper and silver on the quality and morphology of nanometallic layers.