New Cu(I), Ag(I)and Au(I) complexes with silyllated and perfluorinated carboxylates [RCOOMPR₃], and tertiary phosphines PR₃; R= Me, Et and diphosphines were characterized by ¹³C, ¹⁹F, ³¹P NMR, IR, MS spectroscopy and thermal properties studied. Thermal decomposition of complexes proceeds in a multistage processes, which yields metallic final product detected by XRD. Results of MS studies and thermal analysis exhibited were used to propose the decomposition mechnism. TGA/IR analysis of gases evolved during decomposition revealed metallated particles in gases, which decide about the transport mechnism in CVD processes. Thermal decomposition of copper complexes, in nitrogen and air yields metallic silver and a mixture of Cu₂O and Cu₂P₂O₇. Chemical Vapour Deposition in hot wall reactor precursors based on studied carboxylates yields nanometric metallic layers. Therefore studied complexes can be treated as a new class of silver, copper and gold precursors. The morphology and composition of the nanolayers were characterised with XRF, XRD, XPS, SEM, STEM and relations between thicknes of the metallic layer and type of precursor were discussed.

Acknowledgement
Financial support from Polish State Committee for Scientific Research grant # 3T08 039 23 is gratefully acknowledged.

• Legal notice:
  

  Copyright (c) Pielaszek Research, all rights reserved.
  The above materials, including auxiliary resources, are subject to Publisher's copyright and the Author(s) intellectual rights. Without limiting Author(s) rights under respective Copyright Transfer Agreement, no part of the above documents may be reproduced without the express written permission of Pielaszek Research, the Publisher. Express permission from the Author(s) is required to use the above materials for academic purposes, such as lectures or scientific presentations.
  In every case, proper references including Author(s) name(s) and URL of this webpage: https://science24.com/paper/1889 must be provided.

1. Studies of CVD Nanometallic Layers Prepared from Cu and Ag Carboxylates
2. Cu(I) complexes with perfluorinated carboxylates as potential CVD precursors