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Nitride-based Surface Acoustic Waves Devices and Applications
|Fernando Calle , Jorge Pedrós , Tomás A. Palacios , Jesús Grajal|
Universidad Politécnica de Madrid, Ciudad Universitaria, Madrid 28040, Spain
Bulk and surface acoustic wave (SAW) devices are a convenient solution for high frequency filters in mobile communication systems due to their stability, reliability and compactness. In addition, SAW filters are ideal for gas sensing, with many industrial, environmental and biomedical applications. Furthermore, SAW sensors offer the additional feature of wireless transmission, and therefore the feasibility of operation in harsh environments. Whereas acoustic wave devices are typically fabricated on quartz or LiNbO3, other piezoelectric materials where devices could exhibit novel or improved characteristics are highly desired. III-nitrides, particularly AlN, combine high SAW velocity and electromechanical coupling coefficients, while showing excellent thermal and chemical stability. These properties pave the way for the development of SAW devices operating at frequencies higher than 2 GHz, a requirement of modern telecomm applications. Moreover, the semiconductor character and direct bandgap of AlGaN enables the integration of SAW devices with electronics and optoelectronics.
Presentation: invited oral at E-MRS Fall Meeting 2004, Symposium C, by Fernando Calle
See On-line Journal of E-MRS Fall Meeting 2004
Submitted: 2004-04-30 18:57 Revised: 2009-06-08 12:55