The structure, functionality and sensing response of metal oxide films will be reviewed with emphasis on In and Zn nanostructures as prepared by Sputtering, PLD, and Spray pyrolysis techniques. Optical, structural and electrical characterization techniques as applied for the in-depth analysis of the film response will be elaborated. Sensing response towards gases such as Ozone, NO₂ and H₂ will be presented utilizing conductometric and Surface Acoustic Waves (SAW) techniques at a range of temperatures and frequencies. It will be shown that sensing responses of the order of a few ppb (6ppb for ozone) at room temperature may be obtained by appropriate control of the film nanostructure.

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