Ultra Sensitive Metal Oxide Gas Sensing Elements

George Kiriakidis 1,2Kostas Moschovis 1,2Ioannis Kortidis 1

1. PEML IESL (FORTH), 100, N. Plastira str, Heraklion 70013, Greece
2. Physics Dpt, Univ. of Crete, PO Box 1527, Heraklion 71409, Greece

Abstract

The structure, functionality and sensing response of metal oxide films will be reviewed with emphasis on In and Zn nanostructures as prepared by Sputtering, PLD, and Spray pyrolysis techniques. Optical, structural and electrical characterization techniques as applied for the in-depth analysis of the film response will be elaborated. Sensing response towards gases such as Ozone, NO2 and H2 will be presented utilizing conductometric and Surface Acoustic Waves (SAW) techniques at a range of temperatures and frequencies. It will be shown that sensing responses of the order of a few ppb (6ppb for ozone) at room temperature may be obtained by appropriate control of the film nanostructure.

Legal notice
  • Legal notice:

    Copyright (c) Pielaszek Research, all rights reserved.
    The above materials, including auxiliary resources, are subject to Publisher's copyright and the Author(s) intellectual rights. Without limiting Author(s) rights under respective Copyright Transfer Agreement, no part of the above documents may be reproduced without the express written permission of Pielaszek Research, the Publisher. Express permission from the Author(s) is required to use the above materials for academic purposes, such as lectures or scientific presentations.
    In every case, proper references including Author(s) name(s) and URL of this webpage: http://science24.com/paper/18387 must be provided.

 

Related papers
  1. Thickness and dc magnetron sputtering growth temperature influence on ZnO thin films optical properties
  2. Direct current magnetron sputtering deposition parameters effect on the properties of Silicon doped Aluminum Zinc Oxide thin films
  3. Comparable study of ZnInO & ZnN as channel layers for transparent transistors
  4. Nanostructured metal oxide thin films for gas sensors

Presentation: Invited oral at E-MRS Fall Meeting 2009, Symposium F, by George Kiriakidis
See On-line Journal of E-MRS Fall Meeting 2009

Submitted: 2009-05-11 11:46
Revised:   2009-06-07 00:48
Google
 
Web science24.com
© 1998-2022 pielaszek research, all rights reserved Powered by the Conference Engine