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Capacitance-voltage characteristics of MIS-structures in base on graded-band MBE Hg1-xCdxTe at passivation epitaxial grown in situ CdTe |
Alexander V. Voitsekhovskii , Sergey N. Nesmelov , Stanislav M. Dzyadukh |
Tomsk State University (TSU), Lenina, 36, Tomsk 634050, Russian Federation |
Abstract |
The important problem of creators of photodiode matrix in base on Hg1-xCdxTe is a passivation of semiconductor surface . The passivation coating must have low density of surface states in boundary, low densities of fixed and moved charges in insulators also passivation coating must have a stable and homogeneity of properties of boundary and insulator. For passivation surface of Hg1-xCdxTe proposed use of various insulators: native oxide and sulphide, SiO2, ZnS, CdTe. In this work results of investigation capacitance-voltage characteristics MIS-structures in base on graded-band n(p)-Hg1-xCdxTe (x=0.22 and x=0.32-0.36) with grown in situ CdTe are submitted. For improvement stable and electrical strength of insulator coating for several samples on top CdTe formed additional protective layers SiO2-Si3N4 for x=0.22 and ZnTe for x=0.32-0.36. The methods of determination of main parameters of boundary and insulator from capacitance-voltage characteristics of MIS-structures in base on graded-band Hg1-xCdxTe are modified. It is shown that for correct calculation of ideal low-frequency capacity-voltsge characteristics necessary take account of presence of graded-band layers. For various samples the density of fixed and moved charges, density of surface states near middle of forbidden gap are calculated. For all investigated MIS-structures observed little moved charge (less than 10-5-10-6 Cl/m2). For structures with x=0.22 at used as passivation coating only CdTe the density of fixed charge vary from 4.4×10-5 Cl/m2 to1.83×10-4 Cl/m2. For structures with x=0.32-0.36 with single layer CdTe as passivation coating density of fixed charge total 1.9×10-4 Cl/m2, formed of additional layer ZnTe is not lead to increase of value of density of fixed charge. For structures with x=0.32-0.36 formation of ZnTe lead to increase of density of surface states near middle of forbidden gap from 8.7×1010 eV-1cm-2 to (4-5) ×1011 eV-1cm-2. |
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Presentation: Poster at E-MRS Fall Meeting 2009, Symposium D, by Alexander V. VoitsekhovskiiSee On-line Journal of E-MRS Fall Meeting 2009 Submitted: 2009-03-17 08:34 Revised: 2009-08-13 17:30 |