Barrier layers are very important for the protection, reliability and life time of the polymers embeded in photovoltaic or OLED or electronic layers as well as for food packaging. these barrier layers are usually multiple with alternate organic and inorganic materials deposited by PE CVD process. The ability to stop the moisture and oxygen penetration must be assessed. The new ellipsometry porosimetry (EP) technique measures the penetration of solvent, in this case water, in the pores of the layers as BET does for adsorption and desorption cycles.

This presentation will disclose the way the EP works at atmospheric pressure under room temperature and what are the limitations in term of sensitivity to moisture content and the permeability measurements. The barrier layer maybe deposited on a porous layer on a substrate which will change its optical thickness when the moisture diffuses through the inter-connexions of the pores. The diffusion factor of porous layers can be measured by EP.

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