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- Jean-Louis Stehlé

e-mail:
phone: +33-1-46496731
fax: +33-1-42422934
web:
interest(s):

Affiliation:

SOPRA SA

address: 26 Pierre Joigneaux, Bois-Colombes, 92270, France
phone: +33-1-46496722
fax: +33-1-42422934
web:

Participant:

E-MRS Fall Meeting 2008

began: 2008-09-15
ended: 2008-09-19
Presented:
E-MRS Fall Meeting 2008
characterization of barrier layer and porous materials by Ellipsometry porosimetry
E-MRS Fall Meeting 2008
Infra red Spectroscopic Ellipsometry analysis of nano structured thin films in polymers and semiconductors.
E-MRS Fall Meeting 2008
Molecular fractal surfaces analysis with spectroscopic ellipsometry

Publications:
  1. Amorphous hydrocarbon film deposition in plasma assisted CVD process: competition between deposition and erosion
  2. characterization of barrier layer and porous materials by Ellipsometry porosimetry
  3. Infra red Spectroscopic Ellipsometry analysis of nano structured thin films in polymers and semiconductors.
  4. Molecular fractal surfaces analysis with spectroscopic ellipsometry



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