It is nowadays possible to make and control the organization of mesostructured materials at the nanoscale both laterally and perpendicularly to the substrate either by nanolithography or by self assembly. At the nanoscale, x-ray scattering techniques in grazing incidence are ideally suited to characterize in a non intrusive way the structure of such materials. Along the normal to the surface, X-ray reflectivity is a unique tool to investigate their electron density profile. GISAXS (Grazing Incidence Small Angle X-ray Scattering) is on the contrary used in a complementary manner to ascertain the morphology of nanostructured materials parallel to the plane of the substrate. In this work, a brief description of these techniques will be given and we will illustrate their use on various kind of materials ranging from gratings to mesoporous materials.

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1. The international VAMAS project “X-ray reflectivity measurements for evaluation of thin films and multilayers” for X-Ray metrology