CoCu thin films are grown by vapor deposition method. As a substrate we use three kinds of materials: large salt monocrystal, metallic, glass and mica slides. The grain size of thin films was measured from TEM images taken with Philips CM120ST microscope. The measured data was fitted assuming a lognormal distribution and result an average size less than 10 nm. The structural properties of films were carried out by means of SAED and HRTEM. SAED pattern confirm cubic structure of nanocrystals and HRTEM images are used for evaluate uniformity of thin films and investigate defects. Fast Fourier transform was used to measure interplanar distance and for improvement of HRTEM image by applying blob type filter and recalculate image without noise. The films are grown using a different substrate. Finally we studies influence of substrate nature in structural properties of film. In other words, we investigate morphology, crystalographic information and defects from thin films deposited to three kind of substrate: glass, metallic and salt (or amorphous, conducting and nonconducting substrate).

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