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Transmission Electron Microscopy Observations on Self-Assembled Si-Ge Nanorings

Jr-Hau He 1Cheng-Lun Hsin 2Chun W. Wang 2Chih H. Ho 1L-J Chen 2

1. National Taiwan University, Dept. of Electronic Engineering, Taipei 1-06, Taiwan
2. Department of Materials and Science, National Tsing Hua University, Hsinchu, Taiwan


Self-assembled single-crystal ultrasmall nanorings (NRs), as small as 10 nm, on Si and Si-Ge alloys have been fabricated by the mediation of Au nanodots. Si-Ge thin films were transformed into Si-Ge nanorings (silicon nanorings doped with controlled amount of Ge) with the assistance of Au catalysts deposited directly onto the thin film with a simple process. In situ ultrahigh vacuum transmission electron microscopy (in situ UHV-TEM) at high temperature has employed to reveal the process of island formation, evaporation of Au-Si eutectic liquid droplets, and NR formation in real time.

To examine the ring-like nanostructures on the substrates, High-resolution transmission electron microscope (HRTEM) and the line profile of energy dispersive spectrometer (EDS) analysis were conducted. By controlling the size of Au nanodots, the adjustment of the diameter of NRs has been achieved. Moreover, the composition of NRs could be modulated by the deposition of various thin films, such as Si, Si0.8Ge0.2, and Si0.7Ge0.3. The process promises to be an effective nanofabrication technique to produce high density and uniform in size Si and Si-Ge NRs.


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Presentation: Poster at E-MRS Fall Meeting 2007, Symposium J, by Jr-Hau He
See On-line Journal of E-MRS Fall Meeting 2007

Submitted: 2007-05-14 13:26
Revised:   2009-06-07 00:44