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Structure, Composition, Morphology, and Electrical Properties of Amorphous SiOx (0<x<2) Thin Films |
Nicolae Tomozeiu , Henk Rheiter |
R-D Department, Oce Technologies B.V., Urbanusweg 43, Venlo 5900MA, Netherlands |
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Presentation: Oral at E-MRS Fall Meeting 2007, Symposium I, by Nicolae TomozeiuSee On-line Journal of E-MRS Fall Meeting 2007 Submitted: 2007-05-14 08:48 Revised: 2009-06-07 00:44 |