The study of the influence of additives, used for gas sensing and magnetic properties optimization, on structural properties of SnO₂ films, deposited by spray pyrolysis method, was the main goal of research, discussed in this report. Films had thickness from 40 to 400 nm. Cu, Fe, Co, or Ni (0-16 at. %) were used as doping elements. For structural analysis of tested films we used XRD, SEM, and AFM techniques. The change of such parameters as film morphology, grain size, texture, and intensity of X-ray diffraction peaks were controlled. Annealing at 850-1000 ^oC was used for estimation thermal stability of film structure. It was established that tin oxide doping by Fe, Co, Ni, and Cu promoted the change of film morphology. However the decrease of grain size estimated on the base of XRD data was not big. On the base of obtained results it was concluded that the presence of big contents of fine dispersion phase, which does not provide reflexes in XRD patterns, make us to be careful with any quantitative evaluations, made on the base of XRD data, because in this case we obtain information mainly about grains given contribution in XRD patterns, first of all about crystallites incipient at initial growth stage and grown through the whole of film thickness. It was shown that at certain conditions, connected with keeping measurement conditions invariable, the intensity of X-ray diffraction peaks can be considered as a certain parameter, characterizing the crystallinity of studied material. The smaller intensity of X-ray diffraction peaks at the same film’s thickness is, the worse is the crystallinity, i.e. the bigger is the contents of fine dispersion amorphous-like phase in studied film. It was found that the contents of fine dispersion amorphous-like phase in doped films is increased in the line SnO₂:Ni, SnO₂:Fe, SnO₂:Co, SnO₂:Cu. It was shown that thermal unstability of SnO₂ film structure in temperature range 600-800 ^oC is connected with the presence of this phase.

• Legal notice:
  

  Copyright (c) Pielaszek Research, all rights reserved.
  The above materials, including auxiliary resources, are subject to Publisher's copyright and the Author(s) intellectual rights. Without limiting Author(s) rights under respective Copyright Transfer Agreement, no part of the above documents may be reproduced without the express written permission of Pielaszek Research, the Publisher. Express permission from the Author(s) is required to use the above materials for academic purposes, such as lectures or scientific presentations.
  In every case, proper references including Author(s) name(s) and URL of this webpage: https://science24.com/paper/10574 must be provided.

1. Spectroscopic cathodoluminescence study of nanostructured SnO2 films deposited by spray pyrolysis
2. Structural stability of In2O3 films deposited by spray pyrolysis