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- Woong-Sun Kim

e-mail:
phone: +82-2-22200386
fax: +82-2-22982850
web:
interest(s):

Affiliation:

Hanyang University

address: 14-509, Heangdang-Dong, Seong-dong-Gu, Seoul, 133-791, Korea, South
phone: +82-2-22200386
fax: +82-2-22982850
web: http://www.thinfilmlab.com

Participant:

E-MRS Fall Meeting 2007

began: 2007-09-17
ended: 2007-11-30
Presented:
E-MRS Fall Meeting 2007
Plasma enhanced atomic layer deposition of titanium oxide passivation layers on polymer substrates

Publications:
  1. A study for interface of ruthenium deposited by rf-direct plasma enhanced atomic layer deposition
  2. Characterization of ruthenium titanium nitride thin films deposited by rf-direct plasma atomic layer deposition
  3. Plasma enhanced atomic layer deposition of titanium oxide passivation layers on polymer substrates



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