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prof Yurii Makogon
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Affiliation:
National Technical University of Ukraine KPI
address:
pr.Peremogy 37, Kyiv, 03056,
Ukraine
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Publications:
Annealing ambient effect of the phase formation in the Ni(10nm)/C(2nm)/Si(001) thin film system
Application of the spectroscopic ellipsometry for studying of the ТіSi
2
silіcide formation induced by thermal annealing of the Ті/Si multilayered films
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