Search for content and authors
 

Lauri Niinisto

e-mail:
phone:
fax:
web:
interest(s):

Affiliation:

Laboratory of Inorganic and Analytical Chemistry, Helsinki University of Technology, P.O. Box 6100, FIN-02015 Espoo

address: , Helsinki, , Finland
phone:
fax:
web:

Participant:

E-MRS Fall Meeting 2003

began: 2003-09-15
ended: 2003-09-11
Presented:
E-MRS Fall Meeting 2003
Advanced electronic and optoelectronic materials by Atomic Layer Deposition: An overview with special emphasis on recent progress in processing of high-k dielectrics

Publications:
  1. Advanced electronic and optoelectronic materials by Atomic Layer Deposition: An overview with special emphasis on recent progress in processing of high-k dielectrics
  2. Atomic layer deposition as a tool for tailoring adhesion properties of interfaces.
  3. Low temperature ZnMnO by ALD
  4. ZnMnO Films grown by Atomic Layer Deposition with uniform Mn distribution



Google
 
Web science24.com
© 1998-2024 pielaszek research, all rights reserved Powered by the Conference Engine