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prof Vasyl P. Kladko
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| e-mail: | ***@isp.kiev.ua |
| phone: | +38-44-5255758 |
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Affiliation: |
V.E.Lashkarev Institute of Semiconductor Physics of NAS of Ukraine |
Affiliation: |
V.Lashkaryov Institute of Semiconductor Physics NAS Ukraine |
Participant: |
| began: | 2013-08-11 |
| ended: | 2013-08-16 |
| Presented: | |
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Publications: |
- Diffusion barrier properties of reactively sputtered W-Ti-N thin films
Investigation of Deformation Fields Anisotropy in Multilayered (In,Ga)As/GaAs Structures with Quantum Wires by HRXRD. Relationship between condition of deposition and properties of W-Ti-N thin films prepared by reactive magnetron sputtering - Structural analysis of reactively sputtered W-Ti-N thin films
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