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Growth and characterization of (Co,Fe)Si2 solid solution crystals |
Wojciech Gurdziel , Jacek Krawczyk , Zygmunt Wokulski |
University of Silesia, Institute of Materials Science, 12, Bankowa Str., Katowice 40-007, Poland |
Abstract |
Metal disilicides are good thermal and electrical conductors, possess a high hardness and chemical stability. They have properties which are the most required in microelectronic fields. There are used in VLSI and ULSI circuits. |
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Presentation: Poster at Joint Fith International Conference on Solid State Crystals & Eighth Polish Conference on Crystal Growth, by Jacek KrawczykSee On-line Journal of Joint Fith International Conference on Solid State Crystals & Eighth Polish Conference on Crystal Growth Submitted: 2007-01-15 12:01 Revised: 2009-06-07 00:44 |