A model of electrochemical impedance spectroscopy (EIS) responses of multilayer (multiphase and multicomponent) systems is presented. EIS spectra are simulated by a numerical solution of the Nernst-Planck-Poisson problem. The method of lines with a finite difference spatial discretization is applied. The continuity and field equations are integrated by means of the Rosenbrock solver in Mathcad 12. The model can be applied to a system under phase transition in which the planar symmetry is retained. Depending on the thickness of segregated layers, different characteristics of impedance spectra are expected. From a single bulk arcs for nanoscale films to well defined bulk and diffusional arcs for thick films. A moderate behavior for mesoscale films is shown.The model may be applied for in-situ, non-destructive monitoring of transient processes from nano- to mesoscale.

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