Because of their reduced size, the nanostructures have specific properties different from those of bulk materials, which not only depend on their nature or morphology but also on their spatial arrangement. In particular, the optical spectra of noble metallic nanoclusters embedded in a dielectric matrix (nanocermet thin films) are characterized by an absorption band in the visible spectrum, known as surface plasmon resonance (SPR). In this context, we develop an activity that aims to understand and control the growth of Ag nanoclusters (NCs) dispersed in a Si₃N₄ matrix. The nanocermets are elaborated by dual ion beam sputerring in the form of (Si₃N₄/Ag)_n multilayers deposited on plane oxide surfaces and Si₃N₄/Ag/Si₃N₄ trilayers deposited on vicinal oxide surfaces. The morphology and the organization of the Ag NCs are determined by transmission electronic microscopy (TEM) and atomic force microscopy. In parallel spectroscopic ellipsometry and light transmission spectroscopy are used to determine the optical response of the films. First, we show that on a plane surface the Ag NCs are organized in an isotropic way with a short-range order. Then, for multilayer systems, the analysis by autocorrelation of the cross-section TEM images shows that the NCs are organized preferentially in the hollows formed by the intermediate matrix layer and that the degree of order depends on the thickness of this transition layer. In addition, it is possible to use vicinal surfaces of Al₂O₃ to obtain a preferential organization of the NCs along the steps, which results in a shift of the position of the SPRs according to the polarization of the incident electromagnetic field.

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