ScN films have been grown on MgO(001) substrates using rf MBE. Both reflection high energy electron diffraction and x-ray diffraction confirm the (001) orientation of the films. Scanning tunneling microscopy shows only 1×1 surface reconstruction. Optical absorption results indicate a direct transition at 2.15 eV and a sub-transition with an indirect behavior. Scanning tunneling spectroscopy of ScN surfaces confirms the existence of the indirect transition with E_g of 0.9 ± 0.1 eV. The ScN(001) films on MgO(001) have been used as substrates to grow ScMnN alloys. The incorporation of the Mn into ScN has been studied as a function of the growth temperature. Structural measurements indicate the face-centered tetragonal rocksalt-type crystal structure with Sc and Mn cations and N anions. In addition to the solute incorporation into the lattice, atomic force microscopy images show that the surface of the alloy grown at T ≤ 518 ^oC contains dot-like features, indicating surface accumulation. The areal dot density is found to decrease as the growth temperature increases, whereas the Mn incorporation increases at 518 ^oC. Moreover, growth at 612 ^oC leads to increased desorption rate, resulting in less Mn incorporation, suggesting nearly optimized growth at T = 518 ^oC. The alloy is found to have lattice parameters which depends on the Mn/(Mn+Sc) bulk ratio; the lattice constants follow Vegard's law depending on the Mn bulk fraction and the lattice constants of ScN and theta-MnN

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