This report describes the measurement of elastic coefficient and its thermal dependence for TiNi shape memory alloy films prepared by using a composition controlled sputtering technique. The sputtering technique was employed by which the diameter of ring shaped erosion region in a composite target is controlled by the magnetic field applied from the outside of the sputtering chamber, as reported by one of the present authors. The elasticity of the NiTi thin films was measured by using the vibrating reed method. The reed (cantilever) of the films was prepared by peeling from glass substrates, and shaped into 30mm length x 7mm width x 19micro-meter thick. The elasticity versus temperature curves were measured as changes in the first mechanical resonant frequency of the cantilever at each temperature. The displacement response to a mechanically excited vibration force of cantilever was detected by using an eddy current displacement meter, and the signal was inputted to PC via GPIB. The thermal elasticity curves obtained by this measurement have an infection point corresponding to the transition point estimated from electrical resistivity data. This measurement becomes difficult since the damping factor of the sample reed increases rapidly, and the displacement response extremely decreases, as the measuring temperature is exceeded above the transition point

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1. Magnetic field analysis for magnetron sputtering apparatus for accurate composition control