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The Impact of Melt Temperature on Rapid in-situ Synthesis of InP |
Jianye Yang 1, Zhiguo Liu , Ruixia Yang , Fan Yang , Shuai Li , Qingfang Huang , Xiaolan Li , Huimin Shao , Yanlei Shi , Xiuwei Tian , Wei Dai , Shujun Cai , Huisheng Liu , Tongnian Sun , Niefeng Sun 1 |
1. Hebei Semiconductor Research Institute, Scicence and Techonology on ASIC Laboratory, Shijiazhuang 050051, China |
Abstract |
Synthesis is the previous step of InP crystal growth and of vital importance to the quality of productions. 5kg of high-quality and stoichiometric InP is being rapidly synthesized and continuously grown in an improved Liquid Encapsulated Czochralski(LEC) system under an argon pressure in the range of 35 to 45 atmospheres. In this system, polycrystalline InP is produced by two double-tube injectors with in-situ injection synthesis method within 2.5 hours, the first injector loads about 550-600g red phosphorus and it takes 50-65 minutes for the phosphorus to react completely, while the second injectors loads about 500-600g red phosphorus and it takes 65-80 minutes, both of the injectors are heated by their own heater in the process of synthesis. After a series of experiments, we find out that when the melt temperature is between 1110℃ and 1090℃ while using the first phophorus injector, and 1090-1070℃ while using the second phosphorus injector, stoichiometric polycrystalline InP can be achieved repeatedly, the melt temperature is slowly reduced by a programme in the synthesis process. By the way, it is very difficult to measure the melt temperature accurately in such a high-pressure system by a thermocouple which is mostly used, heat radiation pyrometer is not applicable also because of the boric oxide encapsulant, while we find a convenient and effective method by counting the increase rate of a thermocouple’s show value which is close to the crucible to define the melt temperature, the deviation is not more than 10℃ from the truth, that is competent. The impact of melt temperature on rapid synthesis of InP is a combined action result of chemical reaction rate and chemical equilibrium, rising melt temperature can increase the rate of synthesis reaction, that is benefit on achieve rapid synthesis, and reduce the lost of red phosphorus which is not able to fully react with indium, but as the synthesis of InP is an exothermic and reversible reaction, exorbitant temperature could make the decomposition reaction too strong, and phosphorus will massively volatilize from the melt which would make phosphorus insufficient. In summary, suitable melt temperature is very important to synthesize InP, and adjusting the melt temperature based on the concentration of indium and InP in the melt is one of the key technologies to achieve rapid, stoichiometric and repeatable synthesis of InP. |
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Presentation: Poster at 17th International Conference on Crystal Growth and Epitaxy - ICCGE-17, Topical Session 4, by Niefeng SunSee On-line Journal of 17th International Conference on Crystal Growth and Epitaxy - ICCGE-17 Submitted: 2013-04-14 17:49 Revised: 2013-07-03 07:10 |