An uncooled microbolometer focal plane array (FPA) has been developed and used for imaging of objects illuminated by monochromatic coherent submillimeter radiation. The temperature of the thermosensitive element increases under the illuminated radiation and the change of the resistance were detected.

            IR matrix microbolometer detector (120x160 elements) for a spectral range 7-14 micron, designed and manufactured in the Institute of Semiconductor Physics SB RAS, was used for registration submillimeter radiation. The transmission of the main elements of the microbolometer detector – silicon oxinitride (air bridge) and vanadium oxide (thermosensitive film) deposited on the sapphire wafer are shown in the figure below. The absorption in the vanadium oxide film is about 10% which is enough for registration terahertz radiation.

Figures are shown the images of the model objects illuminated by the radiation from the laser on the ethanol vapor with wavelength of 115 micron (2.6 THz).

The sample of the image detected by the microbolometer array and produced by radiation of Novosibirsk free electron laser (Institute of Nuclear Physics SB RAS) at a wavelength 130 micron (2.3 THz) is shown on the figure below

Image of a hole (4 mm) formed by a kinoform lens and detected by a matrix of microbolometer detectors.

The moving object can be detecte at the rate of 90 frame per second.

 Noise equivalent power at wavelength 130 micron is NEP = 2х10^-10 W/Hz^1/2.

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1. Matrix 320×256 infrared long wavelength detector with inner short wavelength cut-off filter