During the last decades, recent advances have been achieved in the field of the thin film microbatteries. Major efforts have been carried out on the encapsulation of such devices, given the sensitive aspect of most of materials present on the active stack (lithium containing layers).

It is presented in this work recent achievements concerning thin film encapsulation of metallic lithium negative electrode. In the context of this study, encapsulation stack includes polymer and dielectric layers combined in such way to optimize barrier performances of the whole structure towards oxygen and water vapor permeation.  

The first part of this work is dedicated to the description of the barrier stack architecture and properties. A second part presents the application of a microfabrication process to the metallic lithium negative electrode and barrier stack so as to have very small features (100x100 µm² patterns). The microfabrication process includes several steps of photolithography and etching (dry and wet) blocks, which allowed reaching the targeted critical dimensions. These results put in evidence the success of patterning functional metallic lithium. It demonstrates the feasibility of energy sources miniaturization which is an important issue in the field of autonomous and wireless sensor networks.  

• Legal notice:
  

  Copyright (c) Pielaszek Research, all rights reserved.
  The above materials, including auxiliary resources, are subject to Publisher's copyright and the Author(s) intellectual rights. Without limiting Author(s) rights under respective Copyright Transfer Agreement, no part of the above documents may be reproduced without the express written permission of Pielaszek Research, the Publisher. Express permission from the Author(s) is required to use the above materials for academic purposes, such as lectures or scientific presentations.
  In every case, proper references including Author(s) name(s) and URL of this webpage: https://science24.com/paper/17276 must be provided.

1. Microbattery technology overview and associated multilayer encapsulation process
2. PECVD ion exchange membrane for Proton Exchange Membrane Fuel Cell