Important technological innovations emerged during the past decade in the field of MEMS. Current development programmes dedicated to MEMS are mainly focussed on the technology necessary to fabricate and implement MEMS. Nevertheless, their energy supply and management appear to be, by comparison, neglected. Indeed, available MEMS require “hardwire” connection for either power or communication. Integration of power source with the MEMS to obtain an autonomous or remote system appears to be a challenging task of major interest in the MEMS field.

Lithium microbatteries with different positive electrode materials (V₂O₅, LiCoO₂, TiOS) in association with a solid electrolyte (LiPONB) and a lithium negative electrode are very promising energy storage systems that can fit all the applications requirements. One of the challenge of the technology is related to the fact that lithium microbatteries are easily degraded in atmosphere. Indeed, these devices require encapsulation with a barrier material, which exhibits extremely low permeation rates for water vapour and oxygen. To obtain such a high barrier, we chose to direct our studies on layers deposited by plasma-enhanced chemical vapour deposition (PECVD), and more particularly on amorphous materials like silicon oxide (SiOx) and silicon nitride (SiNx).

Both the active layers of the microbattery architecture and the multilayer encapsulation stack will be discussed.

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1. Microfabrication of thin film microbatteries
2. PECVD ion exchange membrane for Proton Exchange Membrane Fuel Cell