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Layer by Layer Laser Synthesis of 3D Ceramic MEMS from Oxide Powder Mixtures.

Igor V. Shishkovsky 1Yuri G. Morozov 2Maxim Kuznetsov 2

1. P.N. Lebedev Physics Institute of RAS, Samara branch, Novo-Sadovaja st. 221, Samara 443011, Russian Federation
2. Institute of Structural Macrokinetics and Materials Science, Russian Academy of Sciences, Chernogolovka 142432, Russian Federation

The experimental researches of possibility of layer-by layer laser synthesis of 3D ceramic MEMS via the SLS of powder exothermal mixtures traditionally used in technology of SHSare described. In our researches it was accomplished firstly possibility of overlapping of SLS and SHS processes. It haveallowed to receive not only stronger material copies of 3D items of the complexshape, but also to expand the functional characteristics of these three-dimensional objects at the expense of synthesis of new porous phases (piezo- ceramics, ferrites, high-temperature superconductivity etc.). Moreover, the external laser influence is not come only to an additional thermal heating of a reaction mixture. We are considering that the uses of laser radiation approach is very promising, as one of ways of implementation of such resonant condition. 

At the stage of computer modeling at the CAD/CAE level, there are open perspectives of subsequent reproduction of smart 3D structures via SLS. These materials can find their application in the aerospace, chemical, and nuclear power industry. In this case, an SHS reaction is only initiated within a spot of focused laser beam that is scanned over the surface of a powder mixture until formation of a desired computer-designed configuration. At present study, our experimental results by SLS have been described for the following SHS oxide systems:

· mixture of oxides for synthesis of ceramics: TiO2 + ZrO2 + PbO, Al(Al2O3) + Zr(ZrO2);
· mixture of oxides for synthesis of ferrites: BaO2 + Fe2O3 + Cr2O3 + Fe, Li2CO3+ Fe2O3+Cr2O3+Fe.
· high-temperature superconductivity oxide ceramics YBa2Cu3O7, SrFe12O19.

Optimization of the process of 2D and 3D computer-aided prototyping is discussed with emphasis on synthesis of 3D parts. It was emphasized, that PZT and ferrites systems are more perspective for synthesis of functionally graded tools and MEMS.


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Presentation: Poster at E-MRS Fall Meeting 2008, Symposium I, by Igor V. Shishkovsky
See On-line Journal of E-MRS Fall Meeting 2008

Submitted: 2008-05-12 10:25
Revised:   2009-06-07 00:48