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AJA International, Inc. |
Michael Hale |
AJA INTERNATIONAL Inc., 809 Country Way PO.246, Scituate 02060, United States |
Abstract |
Sputtering and E-beam Systems for R&D and Pilot Production. Static and Rotating Magnetron Sputter Sources for HV and UHV, Substrate Holders with Rotation, RF Biasing, Heating and Cooling; Sputter Targets, Microwave, RF and DC Power Supplies, Microwave Components and Plasma Sources, RF Ion/Plasma Sources. |
Legal notice |
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Presentation: Exhibitor at E-MRS Fall Meeting 2007, Commercial exhibitions, by Michael HaleSee On-line Journal of E-MRS Fall Meeting 2007 Submitted: 2007-07-06 15:34 Revised: 2009-06-07 00:44 |