The X-ray guiding monocapillaries belong to a few only types of the X-ray concentrators. Their quality depends essentially on the controlled shape of the walls, wall material and the quality of the internal reflecting walls. The simple analytical ray tracing of the photon trajectories in X-ray capillaries is described. It establishes the parameters of capillaries and conditions to guide the X-ray photons towards the semi-focus. The conditions for the roughness of the mirroring surfaces are determined to allow efficient reflection of X-rays – it means the range of rms should be below 5 nm. The capillaries with the walls made of selected metals are preferred, due to some advantages: better control of the capillary shape and the straightness of the main axis, greater critical reflection angles. The metallic capillaries with gold and rhodium internal surfaces are manufactured according to the galvanoplastic method elaborated at KUL. The internal shape of capillaries was controlled with the laser scan micrometer. The measurements gave the estimation of the long-distance shape distortions, termed a roughness correlation length. The metallic capillaries produced in our laboratory had the long-distance distortions of the order of 60-200 nm. The transmission of the laser light along the main axis of the capillary and registration of the escaped photons on the CCD screen enabled the estimation of the symmetry of transverse cross sections of capillaries. The symmetry was circular. The field emission scanning electron microscope (FESEM) and atomic force microscope (AFM) studies gave the images of the internal surface of the capillary. The AFM measurements determined the surface roughness (rms) and the best gold internal surfaces had the rms in 2 nm range, as measured by AFM on 20 mm x 20 mm areas. The roughness is controlled by changing the composition of the electroplating bath, electropolishing conditions and the measurements of the surface strains.

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