Fe-Pd thin films were fabricated by sequential sputtering of elemental and alloy targets on micro-hotplate (MHP) arrays, in order to investigate their properties as ferromagnetic shape memory alloys (FSMA). The advantages of Fe-Pd-based FSMA in comparison to Ni-Mn-Ga are a higher Curie temperature, saturation magnetization, transformation temperature as well as potentially higher magnetocrystalline anisotropy. The micro-hotplates – microstructured Si₃N₄ and SiO₂ membranes with Pt heaters and measurement electrodes – were used as material processing and characterization platforms: Films on such MHPs can be heated and cooled with rates up to several 1000K/s which enables rapid and precise annealing and quenching of metastable phases. Furthermore, during the heat treatment, the resistance of the thin film on the MHPs can be monitored, so that phase transformations can be identified in situ. The films were characterized by energy disperse x-ray spectroscopy, x-ray diffraction, resistance versus temperature measurements and temperature dependent vibrating sample magnetometry measurements. First results of MHP-processed Fe-Pd thin films show a reversible phase transformation with low hysteresis in a composition range from Fe₇₀Pd₃₀ to Fe₇₂Pd₂₈ in a temperature interval from 50°C to 90°C.

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