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Specific aspects of total internal reflection spectroscopic ellipsometry
|Ondřej Vlašín , Kamil Postava , Richard Dvorský , Jaromír Pištora|
Technical University of Ostrava (VSB), 17. listopadu 15, Ostrava 70800, Czech Republic
Modern science and advanced technology require measurement of anisotropies and inhomogenity of various thin films and nanostructured materials with ever higher demands for precision. Classical spectroscopic ellipsometry is limited by relatively narrow gamut of incident angles. Wider range of tangential propagation constant in a material enables more accurate determination of inhomogenity and anisotropy. Methods of the total internal reflection ellipsometry (TIRE) and the surface plasmon resonance (SPR) overcome this drawback by introducing a prism between sample and incident beam and taking advantage of specific properties of noble metals. These methods are used to analyze various nanostructured solid samples and liquids with dispersed nanoparticles. Phase modulation ellipsometer UVISEL (Horiba - Jobin Yvon) with spectral range of 0.6 to 6.5 eV has been applied. The main advantage of these methods is fast nondestructive probing with high sensitivity.
Acknowledgement: Partial supports from the projects KAN 4001006VB, MSM6198910016 and the Grant Agency of Czech Republic (2002/06/0591) are acknowledged.
Presentation: Poster at E-MRS Fall Meeting 2007, Symposium J, by Ondřej Vlašín
See On-line Journal of E-MRS Fall Meeting 2007
Submitted: 2007-05-14 09:39 Revised: 2009-06-07 00:44