The X-ray reflectivity method is the useful tool for the determination of parameters describing thin- and multilayer film as: thickness (τ - the range from 10 to 2000Å), density (ρ) and roughness (σ). The Cu, Au, Ag real multilayer films with different thickness, have been obtained by vacuum evaporation technique on silicon subtract, was analyzed under different registration condition.

Moreover, the Grazing Incident X-ray Diffraction Geometry (GIXD) method was applied for different incident angles for structure determination of the real multilayer thin films.

The measurements were performed by using the Philips X’PERT diffractometer. The calculations of the characteristic parameters of reflectivity data were carried out by the WINGIXA and SUPREX software. The standard X’PERT software was applied for the determination the characteristic parameters of Grazing Incident X-ray Diffraction Geometry (GIXD) method.

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1. The XRD studies on multicomponent ceramic of the PZT type